INFICON MDC-360C Thin Film Deposition Controller User Manual
Page 142
MDC-360C DEPOSITION CONTROLLER
THEORY OF OPERATION
10-8
Magnesium Oxide
MgO
3.58
21.48
Manganese Mn
7.20
23.42
Manganese (II) Sulfide
MnS
3.99
9.39
Mercury Hg
13.46
11.93
Molybdenum Mo
10.20
34.36
Nickel Ni
8.91
26.68
Niobium Nb
8.57
17.91
Palladium Pd
12.00
24.73
Platinum Pt
21.40
36.04
Potassium Chloride
KC
1.98
4.31
Rhenium Re
21.04
58.87
Rhodium Rh
12.41
42.05
Samarium Sm
7.54
9.92
Scandium Sc
3.0
9.70
Selenium Se
4.82
10.22
Silicon Si
2.32
12.40
Silicon (II) Oxide
SiO
2.13
10.15
Silicon Dioxide (fused quartz) SiO
2
2.2 8.25
Silver Ag
10.50
16.69
Silver Bromide
AgBr
6.47
7.48
Silver Chloride
AgCl
5.56
6.69
Sodium Na
0.97
1.84
Sodium Chloride
NaCl
2.17
5.62
Strontium Sr
2.620
----
Sulphur S
2.07
3.86
Tantalum Ta
16.60
33.70
Tantalum (IV) Oxide
Ta
2
O
5
8.2
29.43
Tellurium Te
6.25
9.81
Terbium Tb
8.27
13.38
Thallium Tl
11.85
5.70
Tin Sn
7.30
12.20
Titanium Ti
4.50
14.06
Titanium (IV) Oxide
TiO
2
4.26 22.07
Tungsten W
19.30
54.17
Tungsten Carbide
WC
15.60
58.48
Uranium U
18.70
37.10
Vanadium V
5.96
16.66
Ytterbium Yb
6.98
7.81
Yttrium Y
4.34
10.57
Zinc Zn
7.04
17.18
Zinc Oxide
ZnO
5.61
15.88
Zinc Selenide
ZnS
5.26
12.23
Zinc Sulfide
ZnS
4.09
11.39
Zirconium Zr
6.51
14.72