INFICON MDC-360C Thin Film Deposition Controller - Manual (Page 88)

MDC-360C DEPOSITION CONTROLLER
OPERATING THE MDC-360C 5-4
Figure 5-6 Power vs. Time Graph
5.6 STATUS DISPLAYS
There are two run time status screens that can be displayed at any time by
pressing the Status key (providing they have each been enabled in the Edit
Display Setup menu). The first key press will bring up the last viewed status
screen, repeatedly pressing the Status key will cycle through the two status
screens, shown below.
Figure 5-7 Source/Sensor Status screen
The Source/Sensor status screen displays the status of the six sensors and sources
including the crystal or pocket position, source power, crystal health, each
sensor's deposition rate and thickness or frequency. You select either sensor
thickness or frequency in the Edit Display Setup Menu by setting the Sensor
Status parameter. Active sources and the active sensors are indicated with an *
next to the number. A failed sensor/crystal is indicated by “--” in the health field.
The Source/Sensor Status Screen also allows the user to change the source pocket
position, sensor crystal position and the active sensor. You can only change the
source pocket and sensor crystal positions if the MDC-360C is setup for
automatic control. The source pocket position can only be changed while the
MDC-360C is in the Ready mode. To change a source pocket number, simply
move the cursor onto the pocket number of the desired source, enter the new
Sample Cr Process Ready
10
Power%
0 1
Sample Cr Process Ready
Src Pckt Power Snsr Xtl Hlth Rate Thick
1*
1 23.7 1* 1 95 00.0 0.000
2 10.0 2 99 00.0 0.000
3 00.0 3 -- 00.0 0.000
4 00.0 4 -- 00.0 0.000
5 00.0 5 -- 00.0 0.000
6 00.0 6 -- 00.0 0.000