INFICON MDC-360C Thin Film Deposition Controller - Manual (Page 83)

MDC-360C DEPOSITION CONTROLLER
PROGRAMMING AND CONTROLLER SETUP 4-43
Figure 4-20 Utility Setup screen
1. Xtal Freq. (2.5, 3.0, 5.0, 6.0, 9.0, 10.0 MHz)
This parameter determines the uncoated crystal frequency type for all sensor
inputs. The default setting is 6.0 MHz.
2. Simulate Mode (On, Off)
This parameter enables or disables the Simulate mode of the controller. The
Simulate mode is used for process testing and differs from the Normal mode only
to the extent that the Thickness and Rate displays are derived from a simulated
sensor input rather that the actual sensor. While in this mode, the simulated
thickness build- up is directly proportional to the displayed power level and
independent of actual thickness on the sensor. The Simulate mode allows the
total deposit process to be simulated. It also allows the tooling factor, density and
acoustic impedance calculations to be conveniently checked and altered at the end
of the run, if necessary.
3. Interface Address. (1-32)
This parameter sets the controller’s computer interface address for the RS-485
and IEEE-488 interfaces.
4. Attention Volume (0-10)
This parameter sets the volume of audio attention sound. Attention sounds
indicate that the controller is waiting for an operator response or action before
continuing the process. A setting of zero disables audio attention sound.
5. Alert Volume (0-10)
This parameter sets the volume of audio alert sound. Alert sounds indicate that a
material alert level has been exceeded. A setting of zero disables audio alert
sounds.
6. Alarm Volume (0-10)
This parameter sets the volume of audio alarm sound. Alarm sounds indicate that
a material alarm level has been exceeded. A setting of zero disables audio alarm
sounds.
Utility Setup
Crystal Frequency 6.0 MHz
Simulate mode On
Interface address 01 (1-32)
Attention Volume 01 (0-10)
Alert Volume
01 (0-10)
Alarm Volume 01 (0-10)
Data Points/min 60 ppm ’