INFICON MDC-360C Thin Film Deposition Controller - Manual (Page 79)

MDC-360C DEPOSITION CONTROLLER
PROGRAMMING AND CONTROLLER SETUP 4-39
6. Rotator Delay (0 to 99 seconds)
This parameter serves two different functions. If the feedback type is “None”
(Not recommended. See cautions in the Installation section.), this parameter tells
the controller how long to wait assuming the crystal is in position. If position
feedback is provided, this parameter tells the controller how long it should wait
for the crystal to reach its target position before it issues a Sensor Fault message.
4.3.3.6 EDIT SOURCE SETUP
Selecting Edit Source Setup will present the Source Setup screen as shown in
Figure 4-18. In this screen you first select the source setup you wish to edit. To
select a source, use the Up-arrow and Down-arrow keys, then press the Right-
arrow or Enter key to select.
Figure 4-18 Source Setup screen
Once selected, the source is configured with the following parameters located on
the right side of the display:
1. Number of Pockets (1 to 16)
This parameter defines the number of pockets, or crucibles, available for the
source. The default value is 1 for a single pocket source.
2. Shutter Relay type (N.O., N.C., None)
This parameter defines the shutter relay type used to control the source shutter.
The following three relay types are available:
N.O. - Relay is normally open and closes to close shutter. For this type, a
“SourceN Shutter” output will be created to interface to the shutter actuator.
N.C. - Relay is normally closed and opens to close shutter. For this type, a
“SourceN Shutter” output will be created to interface to the shutter actuator.
None - No sensor shutter output is created.
3. Shutter Delay (sec) (0.0 to 9.9 seconds)
This parameter should be set to the time it takes for the source shutter to
open/close. At the start of the deposition, the controller will delay adjusting the
power for this amount of time to allow the shutter to completely open. At the end
Source Setup Number of Pockets 01
Shutter Relay Type N.O.
Source #1 Shutter Delay (sec) 0.0
Source #2 Control Direct
Source #3 Drive Up
Source #4 Feedback Type Individual
Source #5 Pocket Delay (sec) 10
Source #6 Source Voltage 10V