INFICON MDC-360C Thin Film Deposition Controller - Manual (Page 72)

MDC-360C DEPOSITION CONTROLLER
PROGRAMMING AND CONTROLLER SETUP 4-32
Ramp To Feed
Feed
Ramp To Idle
Layer Complete
Process Complete
Process Resume
Events - Event conditions are evaluated true whenever the respective event is
true. Controller Events are:
Abort
Halt
Hold
Time Power
Ready
In Process
Simulate
Time Setpoint
Last Layer
Crystal Failure
Crystal Marginal
Min Rate&Max Pwr
Max Rate&Min Pwr
Rate Dev. Alarm
Rate Est. Error
Source Fault
Sensor Fault
Rate Dev. Alert
Max. Power Alert
Min Power Alert
Rate Dev. Atten.
Max Power Atten.
Min Power Atten.