INFICON MDC-360C Thin Film Deposition Controller - Manual (Page 81)

MDC-360C DEPOSITION CONTROLLER
PROGRAMMING AND CONTROLLER SETUP 4-41
circuit) unless the respective pocket is in position then that input is true
(closed to ground). For example, a six-pocket source would use six inputs. If
pocket two was in position then all the inputs would be false except the input
connected to feedback position number two.
BCD - Binary Coded Decimal position feedback. This feedback type
uses binary coding to indicate the pocket position. Inputs are numbered most
significant bit first. For example, an eight-pocket source would use three
inputs. With pocket one in position, all inputs would be false. With pocket
four in position, inputs one and two would be true and input three would be
false.
SNGL HOME - Single home position feedback. This feedback type uses one
input. The input is normally false (open circuit) and should go true (closed to
ground) when pocket one is in position.
IN POSITION - In position feedback. This feedback type uses one input.
The input is normally false (open circuit) and should go true (closed to
ground) when the desired pocket is in position.
NO FEEDBACK - No pocket position feedback is used.
Pocket
Number Input
BCD2 Input
BCD1 Input
BCD0
1 OPEN OPEN OPEN
2 OPEN OPEN GND
3 OPEN GND OPEN
4 OPEN GND GND
5 GND OPEN OPEN
6 GND OPEN GND
7 GND GND OPEN
8 GND GND GND
Table 4-2 Table of Input states for BCD feedback type
7. Rotator Delay (0 to 99 seconds)
This parameter serves two different functions. If the feedback type is “None”
(Not recommended. See cautions in the Installation section) this parameter tells
the controller how long to wait, on the assumption the pocket will get into
position. If position feedback is provided, this parameter tells the controller how
long it should wait for the pocket to reach its target position before it issues a
Source Fault message.
8. Source Voltage (2.5V, 5.0V, 10V)