INFICON MDC-360C Thin Film Deposition Controller - Manual (Page 76)

MDC-360C DEPOSITION CONTROLLER
PROGRAMMING AND CONTROLLER SETUP 4-36
switched if more than one sensor/crystal combinations are enabled for
measurement.
Start Timer 1-8 – Resets the corresponding timer to zero and initiates counting.
The timers are used to trigger other actions and/or outputs some time after the
triggering event or for a set amount of time. This is a momentary action meaning
it only triggers once when evaluated as true. The Start Timer’s condition string
must be evaluated as false then true to trigger again.
Set Soft Node 1-8 – Sets a corresponding softnode. Softnodes are used in
condition strings to trigger actions or outputs.
Once an action is selected then you need to establish when the action should take
place by defining its condition string. This is covered in the earlier section called
Entering a Condition String.
4.3.3.5 EDIT SENSOR SETUP
Selecting Edit Sensor Setup will present the Sensor Setup screen shown in Figure
4-17. In this screen you define the sensor parameters that the controller needs to
interface to the various types of sensors. Once the sensor setup is complete, the
controller will create the necessary inputs and outputs needed to interface to the
defined sensors. To define a sensor, first select the sensor number by using the
Up-arrow and Down-arrow keys to highlight the desired sensor number. Once
selected, the sensor is configured by selecting the appropriate parameters from the
right half of the display:
Figure 4-17 Sensor Setup Screen
1. Number of crystals (1 to 8)
This parameter defines the number of crystals available for that sensor input. For
a single sensor head this would be set to one. For a dual sensor head with
separate oscillators and sensor connections, this would still be set to one because
there is only one crystal for each sensor input. For a multiple rotary type sensor
head, this parameter would be set to the number of crystals that the sensor will
hold.
2. Shutter Relay type (N.O., N.C., None, Dual)
Sensor Setup
Number of Crystals 06
Sensor #1 Shutter Relay Type N.O.
Sensor #2 Control Manual
Sensor #3 Drive
Up
Sensor #4 Feedback Type No Feedback
Sensor #5 Rotator Delay(sec) 00
Sensor #6