INFICON MDC-360C Thin Film Deposition Controller - Manual (Page 87)

MDC-360C DEPOSITION CONTROLLER
OPERATING THE MDC-360C 5-3
5.5 GRAPH DISPLAYS
There are four different run time graph screens that can be displayed at any time
by pressing the Graph key (providing they have each been enabled in the Edit
Display Setup menu). The first key press will bring up the last viewed graph
screen, repeatedly pressing the Graph key will cycle through the four graph
screens, shown below.
Figure 5-3 Rate vs. Time Graph
Figure 5-4 Rate Deviation vs. Time graph
Figure 5-5 Thickness vs. Time Graph
Sample Cr Process Ready
10
Rate
0 1
Sample Cr Process Ready
5
Rate Dev%
1
5
Sample Cr Process Ready
999
Thickness
0 1
Displays the current
process name.
Displays the current
material name.