INFICON MDC-360C Thin Film Deposition Controller - Manual (Page 54)

MDC-360C DEPOSITION CONTROLLER
PROGRAMMING AND CONTROLLER SETUP 4-14
4.2.10 RESUMING A PROCESS FROM ABORT OR HALT
To resume an aborted process, first press the start key. A message will appear
asking you to press the start key again to resume the process. The process will
resume from the layer where the process was aborted starting in either the Rise to
Soak or Rise to Predeposit power states. Once in deposit, the thickness will
continue from the last value prior to the abort.
4.3 DETAILED PROGRAMMING
This section covers all of the MDC-360C programming in detail.
4.3.1 VIEW/EDIT PROCESS
Selecting View/Edit Process from the Main Menu will present the Select Process
screen to delete, copy, view or edit any one of up to 99 processes.
To select a process for viewing and editing, move the cursor onto the desired
process using the Up-arrow and Down-arrow keys, then press the Enter key.
Figure 4-2 Select Process screen
4.3.1.1 DEFINE A PROCESS
Figure 4-3 Define Process screen
Selecting a process will bring up the Define Process screen as shown in Figure
4-3. In this screen you enter all of the parameters that define a process. A
Select Process: 01 Cr ----------
02 Au
03
04
05
1 - Copy
06
0 - Delete 07
- View/Edit 08
’
Process Name Layer# Thickness Material
Sample ------ 001 0.500 Cr
View/Run 0000 002 1.350 Au
Edit 0000 003 0.000 End Layer
004 0.000 End Layer
005 0.000 End Layer
006 0.000 End Layer
007 0.000 End Layer
View or Run Password
Edit Password