INFICON MDC-360C Thin Film Deposition Controller User Manual
Page 167
MDC-360C DEPOSITION CONTROLLER
COMPUTER INTERFACE 11-25
Byte # Bit #
Description
Length(bytes) Format
Units
1 0
Power
4 String
%
1
Thickness
5
String
KÅ
2
Deposition
rate
4
String
Å/sec
3
Crystal
health
2
String
%
4
Layer
number
3
String
None
5
Rate
deviation
4
String
%
6
Active
Process
2
String
7
Active
Material
2
String
2 0
Active
Source
1 String
1
Sensor #1 Rate
4
String
Å/sec
2
Sensor #2 Rate
4
String
Å/sec
3
Sensor #3 Rate
4
String
Å/sec
4
Sensor #4 Rate
4
String
Å/sec
5
Sensor #5 Rate
4
String
Å/sec
6
Sensor #6 Rate
4
String
Å/sec
7
Sensor #1 Thickness
5
String
KÅ
3
0
Sensor #2 Thickness
5
String
KÅ
1
Sensor #3 Thickness
5
String
KÅ
2
Sensor #4 Thickness
5
String
KÅ
3
Sensor #5 Thickness
5
String
KÅ
4
Sensor #6 Thickness
5
String
KÅ
5
Sensors #1-6 Crystal Position
6
String
6
Sensor #1 Health
2
String
%
7
Sensor #2 Health
2
String
%
4
0
Sensor #3 Health
2
String
%
1
Sensor #4 Health
2
String
%
2
Sensor #5 Health
2
String
%
3
Sensor #6 Health
2
String
%
4
Sources #1-6 Pocket Position
6
String
5
Layer Time To Go
7
String
h:mm:ss
6
State Time To Go
7
String
h:mm:ss
7
Elapsed Process Time
7
String
h:mm:ss
5
0
Elapsed Layer Time
7
String
h:mm:ss
1
Elapsed State Time
7
String
h:mm:ss
2
Sources #1-6 Status bits
6
3
Sensors #1-6 Status bits
6
4
Controller
State
1
Binary
5
Trouble
Flags
6
6
Controller
Status
2
7
Unused
0
6 0-7
Unused
0