INFICON MDC-360C Thin Film Deposition Controller - Manual (Page 186)

MDC-360C DEPOSITION CONTROLLER
SYSTEM: ENTERED BY: APPROVED BY: DATE:
14.4 INPUTS
Input
#
Input Name True/Logic Card # Pin # Return
Pin #
1
LOW
HIGH
2
LOW
HIGH
3
LOW
HIGH
4
LOW
HIGH
5
LOW
HIGH
6
LOW
HIGH
7
LOW
HIGH
8
LOW
HIGH
9
LOW
HIGH
10
LOW
HIGH
11
LOW
HIGH
12
LOW
HIGH
13
LOW
HIGH
14
LOW
HIGH
15
LOW
HIGH
16
LOW
HIGH