INFICON MDC-360C Thin Film Deposition Controller - Manual (Page 78)

MDC-360C DEPOSITION CONTROLLER
PROGRAMMING AND CONTROLLER SETUP 4-38
valve. The MDC-360C will create a "SensorX Drive Up" which is either
singly or doubly pulsed to sequentially step the sensor head to the next
position.
5. Feedback Type (Individual, BCD, Single Home, In Position, No Feedback)
This parameter defines the type of feedback for a multiple sensor head. The three
feedback types available are as follows:
Individual - Individual position feedback. This feedback type uses one input
for each crystal position in the sensor head. All inputs are normally false
(open circuit) unless that crystal is in position then that input is true (closed to
ground). For example, a six crystal sensor head would use six inputs. If
crystal two was in position then all the inputs would be false except the input
connected to feedback position number two.
BCD - Binary Coded Decimal position feedback. This feedback type
uses binary coding to indicate which crystal is in position. Inputs are
numbered most significant bit first. For example, an eight crystal sensor head
would use three inputs. With crystal one in position, all inputs would be false.
With crystal four in position, inputs one and two would be true and input three
would be false.
Crystal
number Input
BCD2 Input
BCD1 Input
BCD0
1 OPEN OPEN OPEN
2 OPEN OPEN GND
3 OPEN GND OPEN
4 OPEN GND GND
5 GND OPEN OPEN
6 GND OPEN GND
7 GND GND OPEN
8 GND GND GND
Table 4-1 Table of Input states for BCD feedback type
SNGL HOME - Single home position feedback. This feedback type uses one
input. The input is normally false (open circuit) and should go true (closed to
ground) when crystal one is in position.
IN POSITION - In position feedback. This feedback type uses one input.
The input is normally false (open circuit) and should go true (closed to
ground) when the desired crystal is in position.
NO FEEDBACK - No crystal position feedback is used.