Sensor setup, Source setup, Sensor – INFICON MDC-360C Thin Film Deposition Controller User Manual
Page 189: Setup -9, Source
MDC-360C DEPOSITION CONTROLLER
SYSTEM:
ENTERED BY:
APPROVED BY:
DATE:
14.7 SENSOR
SETUP
Sensor #
1 2 3 4
Number of Crystals
1
2
3
4
5
6
7
8
Shutter Relay Type
N.O. N.C. DUAL
Control
MANUAL DIRECT
BCD INDIV.
Drive
UP DOWN FAST INLINE
SNGL STEP DBL STEP
Feedback Type
NO FEEDBACK INDIVIDUAL
BCD SINGLE HOME IN POSITION
Rotator Delay (sec)
14.8 SOURCE
SETUP
Source #
1 2 3 4
1
2
3
4
5
6 7 8
9 10
11
12
Number of Pockets
13 14 15 16
Shutter Relay Type
N.O. N.C.
Shutter Delay (sec)
Control
MANUAL DIRECT
BCD INDIV.
Drive
UP DOWN FAST INLINE
SNGL STEP DBL STEP
Feedback Type
NO FEEDBACK INDIVIDUAL
BCD SINGLE HOME IN POSITION
Rotator Delay (sec)
Source Voltage
2.5V 5V 10V