INFICON MDC-360C Thin Film Deposition Controller User Manual

Page 64

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MDC-360C DEPOSITION CONTROLLER

PROGRAMMING AND CONTROLLER SETUP

4-24

6. Switch - The sensor is enabled for measurement. The MDC-360C will

switch to a backup crystal/sensor if it fails. The Bkup Snsr and Bkup Xtal
parameters set the backup sensor/crystal that the MDC-360C will switch
to.

Use the Enter key to cycle between these available options.

d. Xtal (0 to 8)

This parameter sets the primary crystal number for this sensor. This parameter is
used with multiple crystal sensor heads. This parameter cannot be greater than
the Number of Crystals setting for this sensor in the Sensor Setup screen. . The
default setting is 1.

e. Backup Sensor (1 to 6)

This parameter sets the backup sensor input number for this sensor. For a dual
sensor head, this parameter is set to 2 assuming sensor #1 is the primary sensor.
However, for six crystal sensor head, this parameter should be the same as the
sensor # and the Backup Xtal # parameter below would be set to two. This is
because the six crystal sensor head uses only one sensor input to measure any of
its six crystals while the dual sensor head uses two sensor inputs to measure either
crystal.

f. Backup Xtal (1 to 8)

This parameter sets the backup crystal number for the backup sensor.

37. Calibrate Sensors

Pressing the right arrow key from this point will bring you to the Calibrate
Sensors screen. In this screen you initiate a sensor tooling factor calibration run
as described in section 10.6.2

38. Material Password (4 digit string)

This parameter defines the edit password for the material. If the password is set
to anything other than 0000 it will not be displayed, and when you attempt to edit
the material you will first be asked to enter the correct password.

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