INFICON MDC-360C Thin Film Deposition Controller - Manual (Page 49)

MDC-360C DEPOSITION CONTROLLER
PROGRAMMING AND CONTROLLER SETUP 4-9
b. BCD - With BCD format , the MDC-360C will create from one
to three outputs based on the number of crystals. For example, an
eight crystal sensor head will use three outputs. If crystal one is
the desired crystal, all outputs will be false. If crystal four is the
desired crystal, outputs one and two will be true and output three
will be false.
4.2.4.1 EXAMPLE USING INFICON’S RSH-600 SIX CRYSTAL SENSOR HEAD
The following is a list of the sensor parameter settings required to control
INFICON’s RSH-600 six crystal sensor head.
Number of Crystals - 6
Shutter Relay Type - None
Control - Direct
Drive - Sngl Step
Feedback Type - Indiv
Rotator Delay - 30
With the above parameter settings, the MDC-360C will create six position
feedback inputs called “SensorN CrystalX” where X ranges from 1 to 6
and one control output called SensorN Drive Up.
The inputs should be connected to the six position feedback pins on the
RSH-600 sensor head. Pin #1 of connector J1 on the sensor head should
be connected to the “SensorN Crystal1” input on the MDC-360C. Pin #2
on the sensor head should be connected to “SensorN Crystal2” on the
MDC-360C and so on. Pin #7 on the sensor head should be connected to
pin #12 or any of the return pins when using the standard MDC-360C I/O
board. When using the MDC-360C Active I/O board then pin #7 of the
sensor head should be connected to one side of a 115VAC source. The
other side of the 115VAC source should be connected to the other side of
the six position feedback inputs on the MDC-360C.
One pin from the SensorN Drive Up output should be connected to the
115 VAC voltage source and the other to J1. The remaining pin on J1
should connect to the other side of the 115 VAC power supply. In this
configuration, combined with the “single step” drive type, whenever the
MDC-360 needs to change crystals it will close the SensorN Drive Up
output for one second. This completes the circuit applying the 115 VAC
to the RSH-600.
4.2.5 INPUT, OUTPUT AND ACTION SETUP
The MDC-360C’s inputs, outputs and actions can be used to provide control for,
or an interface to all sorts of vacuum system peripherals such as PLC system
controllers, substrate heaters, planetary rotators, etc. If your system doesn’t
require any special interfacing or control then you can skip to the next section.