INFICON MDC-360C Thin Film Deposition Controller - Manual (Page 56)

MDC-360C DEPOSITION CONTROLLER
PROGRAMMING AND CONTROLLER SETUP 4-16
This parameter defines the desired thickness for the layer. The default for this
parameter is 0.000 Kang.
Material
This parameter defines the material for this layer. The layer material is selected
from the list of materials defined in View/Edit material. Therefore, you should
define all of the necessary materials for the process before defining the process.
See EDIT MATERIAL PASSWORD section 4.3.2.
To select a material, move the cursors to the material parameter for that layer and
press the Right-arrow key. The Select Layer Material screen will be displayed as
shown below. Scroll to the desired material and press Enter.
The layer material defaults to 'End Layer' meaning this layer marks the end of the
process.
Figure 4-4 Select Layer Material screen
4.3.2 VIEW/EDIT MATERIAL
From the Main Menu, selecting View/Edit Material will present the Select
Material screen shown below.
Figure 4-5 Select Material screen
Select Layer Material 01 Cr ----------
02 Au
03
04
05
06
07
to select material 08
’
Select Material 01 Cr ----------
02 Au
03
04
05
1 - Copy
06
0 - Delete 07
- View/Edit 08
’