INFICON MDC-360C Thin Film Deposition Controller - Manual (Page 183)

MDC-360C DEPOSITION CONTROLLER
SYSTEM: ENTERED BY: APPROVED BY: DATE:
MATERIAL CONT’D
Maximum Power
Max Power Alarm Delay
Minimum Power
Rate Deviation Attention
Rate Deviation Alarm
Rate Deviation Abort
Sample Dwell %
Sample Period
Crystal Fail
Backup Sensor #
Backup Crystal #
Backup Tooling Factor
Material Password