INFICON MDC-360C Thin Film Deposition Controller - Manual (Page 71)

MDC-360C DEPOSITION CONTROLLER
PROGRAMMING AND CONTROLLER SETUP 4-31
arrow key to highlight the number on the right column. You then type the number
5 and press Enter.
Figure 4-13 Output Conditions Selection - Sub menu
4.3.3.3.2 CONDITION TYPES
States - State conditions are evaluated true whenever the controller is in the
respective state. Controller States are:
Process Ready
Start Layer
Change Pocket
Change Crystal
Layer Ready
Soak Rise
Soak Hold
Predeposit Rise
Predeposit Hold
Establish Rate
Deposit 1
Rate Ramp 1
Deposit 2
Rate Ramp 2
Deposit 3
Rate Ramp 3
Deposit 4
Rate Ramp 4
Deposit 5
Condition Process
Type:
Material
Source
Pocket
Softnode
Sensor
SnsrXtal
Layer Number:
005