INFICON MDC-360C Thin Film Deposition Controller - Manual (Page 57)

MDC-360C DEPOSITION CONTROLLER
PROGRAMMING AND CONTROLLER SETUP 4-17
4.3.2.1 DEFINE A MATERIAL
Selecting a material for viewing and/or editing will present the screen which
permits the material to be defined, shows the first page of this screen. In this
screen, you define all of the material parameters for the selected material. The
material parameters are described in detail below.
Figure 4-6 Define Material screen
1. Material Name (A ten character material name)
The material name parameter allows you to either use the keypad to type in a
name, or pick a name from the materials already stored in the material library.
To pick a material from the material library, highlight the material parameter and
press the Right-arrow key. This will display a complete list of materials that are
stored in the MDC-360C. To pick a material, highlight that material and press
Enter key. Once a material is chosen, the stored values for the density and
acoustic impedance for that material are automatically entered into their
respective parameters.
2. Source# (1 to 6)
This parameter defines the source output number that will be used for this
material, and cannot be greater than the number of source outputs fitted to the
controller. The default setting is 1.
3. Pocket# (1 to 16)
This parameter defines the pocket number that contains this material. This
parameter cannot be greater than the Number Of Pockets parameter in the Source
Setup screen. The default setting is 1.
4. Density (0.80 to 99.99 gm/cm
3
)
This parameter provides the material density so that the controller can calculate
and display the physical film thickness. If the film density is known it should be
used. A list of the more commonly used film densities is presented in Table 10-1.
As a first approximation, bulk material density can be used in programming.
Empirical calibration of this parameter is described in Section 10.6.1.
5. Acoustic Impedance (0.50 to 59.99 gm/cm
2
/sec)
Material Name: Cr ---------- Press >
Source 1
Pocket 1
Density 07.20 gm/cm^3
Acoustic Impedance 28.95 gm/cm^2/sec
Tooling Factor 070.0 %
Proportional Gain 1000
Integral Time 99.9 seconds
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