Table 10-1 and a technique for em – INFICON MDC-360C Thin Film Deposition Controller User Manual
Page 141
MDC-360C DEPOSITION CONTROLLER
THEORY OF OPERATION
10-7
Table 10-1 Material Density and Acoustic Impedance Value
Material Symbol
Density
(mg/cm
2
)
Impedance
(10
5
gm/cm
2
sec)
Aluminum Al
2.70
8.17
Aluminum Oxide
Al
2
O
3
3.97 26.28
Antimony Sb
6.62
11.49
Arsenic As
5.73
9.14
Barium Ba
3.5
4.20
Beryllium Be
1.85
16.26
Bismuth Bi
9.8
11.18
Boron B
2.54
22.70
Cadmium Cd
8.64
12.95
Cadmium Sulfide
CdS
4.83
8.66
Cadmium Telluride
CdTe
5.85
9.01
Calcium Ca
1.55
3.37
Calcium Fluoride
CaF
2
3.18 11.39
Carbon (Diamond)
C
3.52
40.14
Carbon (Graphite)
C
2.25
2.71
Chromium Cr
7.20
28.95
Cobalt Co
8.71
25.74
Copper Cu
8.93
20.21
Copper (I) Sulfide (alpha)
Cu
2
S 5.6
12.80
Copper (I) Sulfide (beta)
Cu
2
S 5.8
13.18
Copper (II) Sulfide
CuS
4.6
10.77
Dysprosium Dy
8.54
14.72
Erbium Er
9.05
11.93
Europium Eu
5.244
----
Gadolinium Gd
7.89
13.18
Gallium Ga
5.93
14.89
Gallium Arsenide
GaAs
5.31
5.55
Germanium Ge
5.35
17.11
Gold Au
19.30
23.18
Hafnium Hf
13.09
24.53
Holnium Ho
8.8
15.2
Indium In
7.30
10.50
Indium Antimonide
InSb
5.76
11.48
Iridium Ir
22.40
68.45
Iron Fe
7.86
25.30
Lanthanum La
6.17
9.59
Lead Pb
11.30
7.81
Lead Sulfide
PbS
7.50
15.60
Lithium Li
0.53
1.50
Lithium Fluoride
LiF
2.64
11.41
Magnesium Mg
1.74
5.48
Magnesium Fluoride
MgF
2
3.0
13.86