Min rate&max power, Max rate&min power, System setup memory corrupted – INFICON MDC-360C Thin Film Deposition Controller User Manual
Page 94: Process memory corrupted, Material memory corrupted, Rate est. error, Crystal failure, Source fault, Min rate&max power -10, Max rate&min power -10
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Min rate&max power, Max rate&min power, System setup memory corrupted | Process memory corrupted, Material memory corrupted, Rate est. error, Crystal failure, Source fault, Min rate&max power -10, Max rate&min power -10 | INFICON MDC-360C Thin Film Deposition Controller User Manual | Page 94 / 196
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