Yokogawa Single Channel Oxygen Analyzer System ZR22/ZR402 - Manual (Page 40)

IM 11M13A01-02E 2-21
2. Specifications
᭹ Piping Diagram
CHECK
OUT
ZERO GAS IN AIR IN
Instrument air Approx.
1.5 l/min.
flow
meter flow
meter
REF
OUT
*2 *2
EV1 EV2
* 2 Needle valve is supplied as accessory with flow meter.
Air set
F2.7E.EPS