Yokogawa Single Channel Oxygen Analyzer System ZR22/ZR402 - Manual (Page 39)

IM 11M12A01-03E 2-20
CHECK
OUT
ZERO GAS IN AIR IN
Instrument air Approx.
1.5 l/min.
flow
meter flow
meter
REF
OUT
*2 *2
EV1 EV2
Piping
F2.6-3E.EPS
*2 Needle valve is supplied as accessory with flow meter.