IAI America RCS3PCR-SS8C - Manual (Page 47)


2. Specification
38
(5) Cleanliness class of clean room type RCP2CR
Item Specification
Cleanliness
class
Class 10 (1 �m) when air is suctioned from the suction joint at an appropriate rate of
suction
(6) Common specifications
[RCS2, Cleanroom specification RCS2CR]
Item Specification
Positioning repeatability � 0.02 mm
Lost motion 0.1 mm or less
[RCS3(P), Cleanroom specification RCS3(P)CR]
Item Specification
Positioning repeatability � 0.02 mm [�0.01 mm]
Lost motion 0.1 mm or less [0.05 mm or less]
The values in [ ] apply to the high-precision type.