Document Outline

• Cover Page
• Title Page
• Trademarks
• Disclaimer
• Copyright
• Declaration Of Conformity
• Warranty
• Table Of Contents
• Chapter 1 Introduction and Specifications
  • 1.1 Introduction
  • 1.2 EIES Controller
  • 1.3 EIES Sensor
  • 1.4 EIES Detector
  • 1.5 EIES Software
  • 1.6 Quartz Crystal Monitor
  • 1.7 Analog Measurements
  • 1.8 Specifications
    • 1.8.1 Sensor
    • 1.8.2 Detector
    • 1.8.3 Controller
• Chapter 2 Quick Start
  • 2.1 Introduction
  • 2.2 Installation
    • 2.2.1 Sensor Installation
      • 2.2.1.1 Sensor Covers, High Rate and Standard Rate
    • 2.2.2 Detector — Direct Installation
    • 2.2.3 Sensor to Fiber Optic Installation
    • 2.2.4 Controller Installation
    • 2.2.5 QCM Option Installation
  • 2.3 EIES Software
    • 2.3.1 Software Installation
    • 2.3.2 EIES Main Screen
    • 2.3.3 Edit Film
    • 2.3.4 Edit Processes
    • 2.3.5 Edit Layer
    • 2.3.6 Views
    • 2.3.7 Software Summary
  • 2.4 Initial Setup
    • 2.4.1 Power-up Sequence
    • 2.4.2 Communications
    • 2.4.3 Detector Calibration
    • 2.4.4 Sensor Setup
    • 2.4.5 QCM Option
    • 2.4.6 Digital I/O
  • 2.5 Operation
    • 2.5.1 Build a Single Layer Process
    • 2.5.2 Setup Layer Parameters
    • 2.5.3 Start Deposition
    • 2.5.4 Manual Calibration
    • 2.5.5 QCM Calibration
    • 2.5.6 Stop Deposition
• Chapter 3 EIES Software
  • 3.1 Introduction
  • 3.2 Installation
  • 3.3 Main Screen
    • 3.3.1 Status Panel
    • 3.3.2 Control Panel
    • 3.3.3 Readings Panel — Process Mode
    • 3.3.4 Readings Panel — Ratio Mode
    • 3.3.5 Readings Panel — Readings Mode
      • 3.3.5.1 Channel Readings
      • 3.3.5.2 Sensor Readings
      • 3.3.5.3 QCM Readings
    • 3.3.6 Menu
  • 3.4 File Menu
    • 3.4.1 File >> Open Process
    • 3.4.2 File >> Open and Save Database
    • 3.4.3 File >> Data Log On/Off
    • 3.4.4 File >> Data Log Setup
      • 3.4.4.1 Format of the DataLog file
    • 3.4.5 File >> Print Screen
    • 3.4.6 File >> Page Setup
    • 3.4.7 File >> Exit
  • 3.5 Edit Process
  • 3.6 Edit Layer
    • 3.6.1 Layer Grid
    • 3.6.2 Rate Ramps Grid
    • 3.6.3 X Chan (Cross Channel) Tab
    • 3.6.4 Ratio Display Grid
    • 3.6.5 Edit Layer Film Tab
      • 3.6.5.1 Deposit Grid
      • 3.6.5.2 Condition Grid
    • 3.6.6 Edit Layer Film Cal
      • 3.6.6.1 Calibration Grid
      • 3.6.6.2 QCM Grid
  • 3.7 Edit: Film
    • 3.7.1 Deposit Grid
    • 3.7.2 Condition Grid
    • 3.7.3 Film Cal(ibration) Tab
      • 3.7.3.1 Calibration Grid
      • 3.7.3.2 QCM Grid
  • 3.8 Edit >> System
    • 3.8.1 Channel Tab
    • 3.8.2 Sensor Tab
    • 3.8.3 QCM Tab
    • 3.8.4 Digital I/O Tab
      • 3.8.4.1 Relay Assign
      • 3.8.4.2 Input Assign:
    • 3.8.5 Comm Tab
      • 3.8.5.1 Guardian
      • 3.8.5.2 External
    • 3.8.6 Display Tab
  • 3.9 View Menu
    • 3.9.1 Process, Ratio, Readings
    • 3.9.2 Graph Selection
      • 3.9.2.1 Graph Setup
        • 3.9.2.1.1 Show Channel — Axis
        • 3.9.2.1.2 Y Axis Left/Right
        • 3.9.2.1.3 X Axis
• Chapter 4 Installation
  • 4.1 Introduction
  • 4.2 Sensor / Feedthrough Assembly
    • 4.2.1 Sensor Position
    • 4.2.2 Sensor Covers
    • 4.2.3 Rigid Sensor Installation
    • 4.2.4 Sensor Filament Cables
      • 4.2.4.1 016-600-Gxx Standard Single Sensor
      • 4.2.4.2 016-601-Gxx Gas Compensating Sensor
  • 4.3 Detector
    • 4.3.1 Detector Cable(s)
    • 4.3.2 Single-Detector Systems
    • 4.3.3 Multiple-Detector Systems
      • 4.3.3.1 Fiber Optic Beam Splitting
      • 4.3.3.2 Fiber Optic Beam Splitter Installation
      • 4.3.3.3 Optical Beam Splitter
  • 4.4 Optical Filters
  • 4.5 Computer Connections
    • 4.5.1 RS232 Serial Interface
    • 4.5.2 TCP/IP Ethernet Interface
      • 4.5.2.1 Network Connection
      • 4.5.2.2 How to Set Up the Network Protocol on the PC
  • 4.6 Controller Installation
    • 4.6.1 Digital I/O
    • 4.6.2 Relay Connector Pinout
    • 4.6.3 Input Connector Pinout
      • 4.6.3.1 Emission Interlock Connector
    • 4.6.4 Sensor(s)
    • 4.6.5 Control Outputs
    • 4.6.6 Computer
    • 4.6.7 Mains Power
  • 4.7 Quartz Crystal Monitor Option (QCM)
  • 4.8 Monochromator Option
    • 4.8.1 Monochromator Installation
    • 4.8.2 Monochromator Operation
• Chapter 5 Maintenance & Troubleshooting
  • 5.1 How To Contact Customer Support
  • 5.2 Returning Your Instrument to INFICON
  • 5.3 Sensor Maintenance
    • 5.3.1 Sensor Cleaning
    • 5.3.2 EIES Filament or Emitter Assembly Replacement
  • 5.4 Chassis Cleaning
  • 5.5 Troubleshooting
• Chapter 6 Theory & Calibration
  • 6.1 Introduction
  • 6.2 Theory of EIES Measurements
    • 6.2.1 Sensor
    • 6.2.2 Optical Discrimination
    • 6.2.3 Detector
  • 6.3 Theory of QCM Measurements
    • 6.3.1 Density
    • 6.3.2 Z-Ratio or Z-Factor
    • 6.3.3 Tooling Factor
  • 6.4 EIES Calibration
    • 6.4.1 Detector Calibration
    • 6.4.2 PMT Voltage Selection
    • 6.4.3 Zero Calibration
    • 6.4.4 Gain Calibration - Test Run
    • 6.4.5 Gain Calibration - QCM
    • 6.4.6 Cross Channel Calibration
  • 6.5 Loop Tuning
• Chapter 7 Communications
  • 7.1 Introduction
  • 7.2 ActiveX (COM) Interface
    • 7.2.1 Setup for ActiveX Control
    • 7.2.2 EIES ActiveX Comm Program
    • 7.2.3 EIES ActiveX Comm Program Protocol
      • 7.2.3.1 Query Command Format
      • 7.2.3.2 Update Command Format
      • 7.2.3.3 EIES ActiveX Program Command Summary
  • 7.3 Guardian Controller Direct Communications
    • 7.3.1 Serial Interface
    • 7.3.2 Ethernet Interface
    • 7.3.3 Guardian Controller Firmware Versions
      • 7.3.3.1 V3.XX Controller Command/Response Format
      • 7.3.3.2 V4.XX Controller Command/Response Format
    • 7.3.4 Command Summary for V3.XX and V4.XX Guardian Controller
      • 7.3.4.1 @
      • 7.3.4.2 A
      • 7.3.4.3 B
      • 7.3.4.4 C
      • 7.3.4.5 D
      • 7.3.4.6 F
      • 7.3.4.7 G
      • 7.3.4.8 H
      • 7.3.4.9 K
      • 7.3.4.10 M
      • 7.3.4.11 N
      • 7.3.4.12 S
      • 7.3.4.13 T
      • 7.3.4.14 V
      • 7.3.4.15 W
• Appendix A Material Optical Parameters
• Appendix B Material QCM Parameters
• Index