INFICON Guardian EIES Controller - Manual (Page 115)

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Guardian Co-Deposition Controller Operating Manual
4.7 Quartz Crystal Monitor Option (QCM)
A Quartz Crystal Monitor (QCM) is commonly used with EIES systems for
calibration of the EIES sensor, and control of materials for which EIES
measurement is not suitable. INFICON's SQM-242 PCI Card or Q-pod is the
recommended QCM for use with the Guardian system because they can be
integrated to provide convenient calibration. External QCM controllers can also be
used with the EIES, but calibration and process control are done manually.
Consult the SQM-242 or Q-pod Operating Manual for detailed instructions on
installing the SQM-242 QCM (and optional SAM-242 Analog Input card) or Q-pod
in your computer.
Chapter 3 of this manual describes setup and operation of the
QCM in conjunction with the Guardian system.
For accurate rate calibration, locate the QCM sensor in the vacuum chamber so
that it receives a representative sample of the materials being deposited. The
length from the crystal to the oscillator should be under 40 in. (1 m) for proper
SQM-242 and Q-Pod QCM operation. A shuttered quartz crystal sensor is
recommended for rate calibration. Although the overriding concern should be for
the EIES Sensor, the crystal should be located as close the EIES Sensor as
possible so as to minimize the spatial variations of the evaporation sources. See
the recommendations of the Sensor’s Operating Manual when installing the
optional shuttered crystal Sensor. It is possible to mount the crystal sensor so as to
capture the evaporant passing through the EIES Sensor. The use of the Sputtering
sensor is convenient for this application as the crystal removes from the rear.