INFICON Guardian EIES Controller User Manual

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Guardian Co-Deposition Controller Operating Manual

Layers are numbered sequentially starting at layer 1. After the layer number is the
EIES software channel that will display readings. Next is the EIES Guardian output
that will control the deposition power supply. And finally, the film that will be
deposited.

It is important to know which channels and outputs are being used in co-deposition,
to avoid assigning more than one film to the same measurement channel or control
output.

Now, click the first layer of process CIGS (don't worry if the material is different than
shown below). Be sure the first layer is highlighted, then click the Copy button; see

Figure 2-6

.

Figure 2-6 Selecting First Layer of Process CIGS

This places a copy of the selected layer on the edit clipboard and enables the Paste
button. With the first layer still highlighted, click the CoDep option below the Paste
button, and then click the Paste button. See

Figure 2-7

.

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