4 sensor filament cables, 1 016-600-gxx standard single sensor, 2 016-601-gxx gas compensating sensor – INFICON Guardian EIES Controller User Manual

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Guardian Co-Deposition Controller Operating Manual

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Wrap aluminum foil (may not be suitable for use with Se) or other shielding
around the light tube, cables, and sensor assembly. Be sure you do not obstruct
the flow of material vapor through the sensor opening.

8

Include special provisions for cooling if your process requires, to allow Sensor
temperature to remain below 450°C.

9

Be sure the Sensor is in an area with less than 2 gauss of stray magnetic field
during deposition. Higher fields may deflect the electron beam and cause the
Sensor to have little or no sensitivity to evaporant.

Use the shortest possible length of light tube between the sensor and feedthrough
to minimize light loss. If more than about 25 cm (15 in.) is needed, consider using
a hollow quartz light tube with transmission >95%/cm from 195 to 1,000 nm. Also,
avoid stray magnetic fields (>2 gauss), which would affect the path of electrons in
the sensor and change the sensitivity to the evaporant material.

4.2.4 Sensor Filament Cables

4.2.4.1 016-600-Gxx Standard Single Sensor

Attach the 600-1406-P10 (3 m) or 600-1406-P40 (12 m) filament cable to the
feedthrough pins labeled "F" using the thumbscrew to secure the connector. Plug
the circular end into the controller "Sensor 1" or "Sensor 2" connector.

4.2.4.2 016-601-Gxx Gas Compensating Sensor

Attach the 600-1407-P10 (3 m) or 600-1407-P40 (12 m) Dual Filament Cable
branch labeled "FLUX" to the feedthrough pins marked "F" and the cable branch
labeled "GAS" to the feedthrough pins marked "G", using the thumbscrews to
secure the connectors. Plug the circular end into the controller "Sensor 1" or
"Sensor 2" connector.

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