6 digital i/o, 5 operation, 1 build a single layer process – INFICON Guardian EIES Controller User Manual
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Guardian Co-Deposition Controller Operating Manual
If the SQM-242 card is installed properly, Card: 2.XX, DLL: OK is displayed. If you
are using a Q-pod, its serial number appears. Verify that each sensor attached to
the QCM displays a frequency reading on the main screen.
2.4.6 Digital I/O
The I/O tab of the Edit System dialog box assigns the Guardian controller's relays
and digital inputs to program functions. See
. Most digital I/O is not
necessary for initial operation. Consult
for I/O programming,
for I/O wiring.
Figure 2-22 I/O Tab
2.5 Operation
This section assumes that you have worked through the example process of
and the initial detector calibration of
.
2.5.1 Build a Single Layer Process
Build a simple single-layer, single-film process in the EIES program and make it the
active process (refer to
). Verify that the EIES channel you
are using has no errors, and shows a reading near zero (refer to
).