INFICON Guardian EIES Controller - Manual (Page 35)

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Guardian Co-Deposition Controller Operating Manual
2.3.5 Edit Layer
Highlight Layer 1: Ch:1 Out:1 Cu and click Edit to display the Edit Layer dialog
box. See
Figure 2-9 .
The Edit Layer dialog box shows all of the parameters needed to deposit the
selected layer. At the top of the dialog box you select the measurement channel
and output to be used, and the film to be deposited in this layer. Select Channel 1,
Output 1, and Film Se. We will set this up to be a QCM channel.
Figure 2-9 Edit Layer Dialog Box
Select the Layer tab and set the rate Setpoint to 10 Å/s, and the thickness Endpoint
to 100 kЕ.