INFICON Guardian EIES Controller User Manual

Page 144

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Guardian Co-Deposition Controller Operating Manual

Query Sensor
@QS;<param1>
where <param1> is:
01

Sensor 1 Status (0=Off, 1=On)

03

Sensor 2 Status (0=Off, 1=On)

05

Gas 1 Status (0=Off, 1=On)

07

Gas 2 Status (0=Off, 1=On)

1n

Sensor n Emission SetPt (mA)

1=Sens1, 2=Sens2, 3=Gas1, 4=Gas2

2n

Sensor n Maximum Leakage (mA) 1=Sens1, 2=Sens2, 3=Gas1, 4=Gas2

3n

Sensor n Gas Calibration

1=Sens1, 2=Sens2

Update Sensor
@US;<param1>;<value>
where <param1> is:
01

Sensor 1 Off

02

Sensor 1 On

03

Sensor 2 Off

04

Sensor 2 On

05

Gas1 Off

06

Gas1 On

07

Gas 2 Off

08

Gas 2 On

1n

Sensor n Emission SetPt (mA)
1=Sens1, 2=Sens2, 3=Gas1, 4=Gas2

2n

Sensor n Maximum Leakage (mA)
1=Sens1, 2=Sens2, 3=Gas1, 4=Gas2

3n

Sensor n Gas Calibration

1=Sens1, 2=Sens2

CAUTION

Refer to the label attached to your sensor or emitter
assembly package for correct emission current settings.
Do not operate 016-xxx series sensors with Yttria
filaments at Emission current greater than 2 mA. Instant
filament failure may occur! 016-xxx series sensors with
Thoria filaments may be operated at 4 mA emission.

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