INFICON Guardian EIES Controller - Manual (Page 97)

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Guardian Co-Deposition Controller Operating Manual
4.2.3 Rigid Sensor Installation
Figure 4-5 Rigid Sensor Installation
1 Loosen the telescoping tube collars and separate the sensor from the
feedthrough.
2 Attach the feedthrough 2.75 in. CF flange to the mating port on the vacuum
chamber wall with the telescoping tube inside the chamber.
3 Slide the telescoping tube into the feedthrough and adjust it (slide it in or out of
the tube attached to the feedthrough) to the approximate position desired.
4 Tighten the collar around the tube and attach the sensor to the other end of the
telescoping tube.
5 Adjust the sensor position and tighten the collar around the tube to hold it in
place. For light pipes longer than 10 in. (25 cm), additional external support is
required to prevent vibrations from affecting its position.
6 Attach the in-vacuum cable(s) from the feedthrough to the sensor(s). Polarity is
not important, but make sure there are no potential shorts to the chamber or
fixturing. (the signals on these wires are biased ±180 V to ground.) For a
standard single sensor, attach the cable to the pins marked "F". For a Gas
compensating sensor, attach the cable from the outer sensor, the Flux sensor,
to the pins marked "F" and the cable from the inner sensor, the Gas sensor, to
the pins marked "G".
WARNING - Risk Of Electric Shock
The sensor outputs are a potential shock hazard. If a
sensor cable is damaged, contact
INFICON for a
replacement.
Small Cutout
Large Cutout Collars
Chamber
2.75 in. Flange