INFICON Guardian EIES Controller - Manual (Page 132)

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Guardian Co-Deposition Controller Operating Manual
6.4 EIES Calibration
EIES is an accurate means of measuring deposition rate and deposition thickness
over a wide dynamic range. However, as with any instrument, it must be set up
properly and calibrated periodically for accurate results.
NOTE: Allow a one hour warm-up for the PMT Detector prior to calibration.
The following discussion assumes you know how to operate the software (refer to
Chapter 3 ).
6.4.1 Detector Calibration
Before use, the electronics of each detector must be calibrated and stored by the
EIES software. This calibration must occur each time the detector is replaced or
moved to another channel on the Guardian controller. Because the PMT voltage is
off during this calibration, it can be done at atmosphere or vacuum, with or without
deposition.
NOTE: Allow one hour warm-up for the PMT to reach optimum stability.
Connect the detector to the Guardian Controller. Start the EIES software and select
Edit >> System, Channel tab. Select the channel the detector is connected to.
Select calibration readings value that is equal to the Update (Hz) value shown. This
will assure four seconds for a total calibration time. When calibration is finished, the
calibration constants for the selected detector will be refreshed.
6.4.2 PMT Voltage Selection
The PMT voltage of the EIES detector can be adjusted to optimize the operating
point for the material and deposition rate to be measured.
NOTE: Allow a one hour warm-up to achieve optimum stability of the PMT.
The PMT voltage setting affects the gain (and to a lesser extent, offset) of the
detector. A low PMT voltage causes noisy readings, while high voltage risks
saturating the PMT output.
In the EIES software, create a layer that uses the desired material (film). Select
Edit >> System, Channel tab. Also show the channel's Edit Layer dialog box, Film
Cal. tab.
Start deposition of the single material. This can be accomplished by manually
controlling your deposition source, or the Manual Power function of the EIES
software. Set the power to achieve a rate near the maximum deposition rate you
want to measure. This can be determined from previous experience with the power
supply setting, or by measuring the true rate with a QCM. It is not important that the
value be exact, just near the upper range of the desired deposition rate.