INFICON Guardian EIES Controller - Manual (Page 51)

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Guardian Co-Deposition Controller Operating Manual
2.5.4 Manual Calibration
Calibrate the main screen rate reading to match the actual rate by entering a Cal.
Gain on the Edit Layer, Film Cal. tab. The Cal. Gain parameter is calculated by
equation [1] .
[1]
2.5.5 QCM Calibration
If you are not using the QCM calibration option, skip to section 2.5.6 .
If you are using the QCM calibration option, select View >> Readings to display
the QCM readings grid. Verify that the QCM measured rate is as expected. The
QCM measured rate will be used to calibrate the EIES detector channel.
On the Edit Layer dialog box, Film Cal. tab, click calibrate Start. After a few
seconds the calculated Cal. Gain will appear. Verify that the main screen's rate
reading matches the QCM rate.
2.5.6 Stop Deposition
This completes the initial operational checkout. Set Manual Power to zero on the
main screen to stop deposition. If you previously pressed Start, click Stop to halt
the process.
Cal. Gain
EIES Measure Rate
Actual Rate
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