7 file >> exit, 5 edit process, 6 file >> page setup – INFICON Guardian EIES Controller User Manual

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Guardian Co-Deposition Controller Operating Manual

3.4.6 File >> Page Setup

Provides printer selection and page orientation for the Print Screen function.

3.4.7 File >> Exit

Stops the current process, turns off Emissions, and exits the EIES program.

3.5 Edit Process

The Edit Process dialog box provides the functions needed to create and edit thin
film deposition processes. A few definitions will be helpful as you use this manual.

A Process is a sequence of Layers of different Films.

Each Layer establishes the desired rate and thickness of the deposited Film.

A Film defines the physical material being deposited, plus all of the instrument
setup parameters associated with that material.

Multiple films deposited simultaneously are known as a CoDeposition (or
CoDep) Layer.

The Edit Process dialog box, see

Figure 3-12

, displays the 25 processes of the

current database in a "treeview" display (similar to the file folders of Windows
Explorer). Click the [+] beside a process to show the layers in that process.

Figure 3-12 Edit Process Dialog Box

Layers are shown as Layer# Channel# Output# FilmName. Channel number is
the EIES channel used for monitoring deposition. Codeposited layers are marked
as CoDep and listed similarly.

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