INFICON Guardian EIES Controller - Manual (Page 32)

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Guardian Co-Deposition Controller Operating Manual
2.3.3 Edit Film
Each material deposited will require unique setup parameters for proper
deposition. 25 materials can be programmed. Click the Edit >> Films to display the
Edit Film dialog box shown in
Figure 2-5 .
Figure 2-5 Edit Film Dialog Box
Click the film drop-down to see a list of all films. Select the first film in the list, then
click the Rename button. Change the film name to Cu, for Copper. This film will
define the basic deposition parameters for Copper. We could adjust the film
parameters, but for now we'll just rename a few more films.
Use the film drop-down to Rename the next three films In, Ga and Se. Close the
Edit Film dialog box and return to the main screen.
2.3.4 Edit Processes
Select Edit >> Processes to view a listing of the 25 processes. A process is a
sequence of layers, each consisting of one or more deposited films. We will use the
Edit Process dialog box to create a multi-layer co-deposition process.
Click the first process, then click Edit. Name the first process CIGS. We will
construct an arbitrary layer sequence using arbitrary parameters for each.
Processes are shown in an outline view, similar to Windows Explorer. Click the +
beside a process to expand the process and show the individual layers. Click - to
collapse the view of the process.