2 optical discrimination – INFICON Guardian EIES Controller User Manual
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Guardian Co-Deposition Controller Operating Manual
6.2.2 Optical Discrimination
Figure 6-2 Spectra for Aluminum, Copper, and a codeposition of 94%Al-6%Cu
Issues common to material codeposition are clearly illustrated in
. The Al
line near 4000 Å is useful. The intensity is not diminished when codeposited with
Cu, and no interfering emission lines are nearby.
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