INFICON Guardian EIES Controller - Manual (Page 94)

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Guardian Co-Deposition Controller Operating Manual
4.2 Sensor / Feedthrough Assembly
The sensor will not pass through the 2.75 in.CF (NW35CF) port. If the chamber is
too small to allow installation from the inside by securing the sensor to the optical
tube and connecting the in-vacuum filament cable at the feedthrough and sensor,
a 4.5 in. CF (NW63CF) or larger flange adapted to the 2.75 in. CF flange is required
to allow the entire sensor to pass through.
Figure 4-1 EIES Single Sensor 016-600-Gxx
NOTE: jt type CAD drawings are available from INFICON to facilitate your
chamber design. Contact INFICON Thin FilmTechnical Support to obtain
these files.