INFICON Guardian EIES Controller - Manual (Page 17)

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Guardian Co-Deposition Controller Operating Manual
Figure 1-4 EIES Single Sensor and Feedthrough 016-600-Gxx
The sensor assembly consists of a 1.33 in. sapphire viewport attached to a 2.75 in.
Conflat
® flange. On the vacuum side of the flange, a telescoping light tube and two
electrical connections are attached to the thermionic emitter. The telescoping tube
can be adjusted to locate the thermionic emitter in the vapor flux.
In the Gas Compensating Sensor, Figure 1-5 , two sensors are stacked on the same
optical tube with the gas compensating sensor rotated 90 degrees out of the vapor
stream.
NOTE: The sensor will not pass through the 2.75 in.CF (NW35CF) port. If the
chamber is too small to allow installation from the inside, a 4.5 in. CF
(NW63CF) or larger flange adapted to the 2.75 in. CF flange is required to
allow the entire sensor to pass through.