INFICON Guardian EIES Controller - Manual (Page 54)

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Guardian Co-Deposition Controller Operating Manual
Figure 3-1 3 Phases of Deposition Cycle
During pre-conditioning, the source material is prepared for deposition. The first
ramp/soak pre-conditioning phase is used to bring the material to a uniform molten
state. The second ramp/soak phase is typically set to a power that produces
evaporation below but near the desired deposition rate.
When pre-conditioning ends, PID rate control of deposition begins. Initially, the
substrate material may remain shuttered until the desired deposition rate is
achieved (shutter delay). Once the control loop achieves the desired rate, the
shutter opens and deposition begins. During deposition, multiple rates (rate ramps)
can be programmed.
When the desired thickness is reached, the evaporation source can be set to zero
or non-zero idle power. At this point the process may be complete, or deposition of
another layer may begin. Up to eight separate films can be co-deposited within a
single layer.
In addition to using EIES PMT detector modules for rate control, QCM inputs (from
INFICON's SQM-242 card or Q-pod) can also be used to control deposition, or to
calibrate the EIES PMT detector module. DC voltage inputs (measured by
INFICON's SAM-242 card) can also be used to control other process variables.