1 sensor covers, high rate and standard rate – INFICON Guardian EIES Controller User Manual
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Guardian Co-Deposition Controller Operating Manual
To install the sensor, loosen the collar that secures the telescoping tube and
separate the 2.75” flange from the sensor assembly. Install the 2.75 in. CF
feedthrough to the vacuum chamber port, with the telescoping tube inside the
chamber.
2.2.1.1 Sensor Covers, High Rate and Standard Rate
The High Rate cover 016-205-P1 is shipped installed on the flux sensor. The
Standard Rate cover 016-205-P2 is shipped separately in a poly bag. For MBE and
other applications where the sensor receives deposition rates below 10 Å/s or the
emission signal is weak, the Standard Rate cover may be preferable as it allows
more evaporant to enter the sensor. When replacing covers, be sure the cover is
securely snapped in place.
Figure 2-2 High Rate and Standard Rate Covers
In the vacuum chamber, slide the sensor assembly onto the telescoping light tube
and adjust the length so that the vapor flux passes through the sensor. The smaller
opening in the sensor cover points toward the evaporant. If necessary, provide
mechanical support to stabilize the sensor assembly. However, do not block the
flux path. Secure the assembly by tightening the tube collar.
Attach the cables from the feedthrough to the sensor. For a standard sensor, attach
the in-vacuum cable to the pins marked "F" (Flux). For a gas compensating sensor,
attach the cable from the outermost sensor to the pins marked "F". Attach the
in-vacuum cable from the inner sensor to the pins marked "G" (Gas). Assure there
are no potential shorting paths to the chamber. The outermost sensor’s cover must
be aligned to allow evaporant material to pass through it, entering at the smaller
rectangular opening and exiting at the large opening. The gas sensor will be
oriented at a right angle relative to the flux sensor and its cover will have several
small holes to permit residual gas to enter, but no evaporant material.
016-205-P2
Standard Rate Cover
016-205-P1
High Rate Cover