INFICON Guardian EIES Controller - Manual (Page 142)

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Guardian Co-Deposition Controller Operating Manual
05 Stop Layer
06 Reset
07 Set Run #
08 Next Layer
09 Set Active Layer #
34 DataLog Off
35 DataLog On
36 DataLog FileName
37 DataLog Interval
38 DataLog Type (0=Overwrite, 1=Append, 2=Run#)
4n Channel n (1 to 8) to Auto Power
49 Set all active channels to Auto Power
5n Channel n (1 to 8) to Manual Power (<Data> = % Power)
59 Set all active channels to Manual Power (<Data> = % Power)
69 Zero all totals
Query/Update Layer
@QL;<param1>;<layer>;<channel>@UL<param1>;<layer>;<channel>
NOTE: A <layer> value of zero sets/returns data on the current layer.
where <param1> is:
01
Film Name
02 Rate Setpoint (Å/s)
03 Final Thickness (kÅ)
04 Time SetPt (mm:ss)
05 Thickness SetPt (kÅ)
06 Start Mode (0/1)
10 Phase of the requested channel (query only)
11 Ramp 1 Start Thickness
12 Ramp 2 Start Thickness
21 Ramp 1 Ramp Time
22 Ramp 2 Ramp Time
31 Ramp 1 New Rate
32 Ramp 2 New Rate
61 xChan1 #
62 xChan2 #
63 xChan3 #
64 xChan4 #
71 xChan1 %
72 xChan2 %
73 xChan3 %
74 xChan4 %
Query/Update Film
@QF;<param1>;<layer>;<channel>@UF;<param1>;<layer>;<channel>;<value>
NOTE: A <layer> value of zero sets/returns data on the current layer.
where <param1> is:
01
P Term
02 I Term