INFICON Guardian EIES Controller - Manual (Page 59)

3 - 7
IP
N 07
4-
51
7-
P1
D
Guardian Co-Deposition Controller Operating Manual
3.3.3 Readings Panel—Process Mode
The readings panel, see Figure 3-8 , has two display modes: Process and
Readings. Click View >> Process to see the process display. The Process display
mode shows process related information such as films, setpoints, and manual
operating controls. Only channels that are defined for the selected layer are
displayed. Use Edit >> System >> Display to select a 4 to 8 channel display.
Figure 3-8 Readings Panel Process Display
Edit Button: Click the Edit button to display the Edit Layer dialog box for the
channel. Consult the Edit Layer section of this manual for detailed layer edit
information.
Channel Film Display: Displays the film assigned to the channel and the current
phase of the channel. During deposition, also displays the current rate setpoint for
the channel.
Channel Rate: Displays the deposition rate reading for the channel. The EIES
detector module measures rate as a current. The current reading is converted to
Å/s (or the desired user units) using film parameters described in the Edit Film
section of this manual.
Deviation: The deviation of the measured rate from the desired rate setpoint.
Total: The accumulated Total thickness for the channel. Typically, rate is displayed
in Angstrom per second (Å/s) and Total is displayed in kÅ. For EIES detector
measurements, Total is calculated by summing each reading times the reading
period (then dividing by 1000 to convert to kUnits). For QCM inputs, Total is the
thickness returned by the quartz crystal. If a channel uses a SAM analog input,
Total is meaningless and is not displayed.
Zero (Total): Zeroes the accumulated total for the channel. To zero all channel
totals, hold the Shift key and click any channel Zero button.
Power: Displays the output power in percent of full-scale voltage.