2 sensor tab – INFICON Guardian EIES Controller User Manual
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Guardian Co-Deposition Controller Operating Manual
3.8.2 Sensor Tab
The format of the Sensor tab is determined by the type of sensor used.
is shown when a gas compensating (GC) controller is used. For non-GC
controllers, only Emission SetPt and Maximum Leakage fields are visible.
Figure 3-23 Edit System Sensor Tab
CAUTION
Refer to the label attached to your sensor or emitter
assembly package for correct emission current settings.
Do not operate 016-xxx series EIES sensors with Yttria
filaments, see
New 016-Series Sensor Exploded on page
, at settings greater than 2 mA. Instant filament failure
may occur! 016-xxx sensors with Thoria filaments may be
operated at 4 mA emission.
When co-depositing materials, you may need to find a balance between signal
strength and noise for multiple channels. Changing the detector PMT voltage (Edit
Layer, Film Cal. tab) can help match the materials to the selected sensor emission
current.
Max. Leak(age): As material is deposited on a sensor, the leakage current
increases until the Guardian can no longer adequately control emission current.
This field establishes the leakage current that will stop deposition.
When leakage current reaches 70% of Max. Leakage, the background of the
emission current reading on the main screen turns yellow, see
.