INFICON Guardian EIES Controller - Manual (Page 62)

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Guardian Co-Deposition Controller Operating Manual
Flux (nA): The flux plus gas signal, minus the background light.
Flux %: The % of full scale for the PMT and A/D converter circuits. Large values
risk overloading the measurement circuit. Small values cause poor signal to noise
ratios. Adjust the detector PMT voltage to achieve 30 to 80%.
Gas (nA): equals PMTCurGas minus PMTCurOff.
Gas %: The % of full scale for the PMT and A/D converter circuits of the GC sensor.
Bkg (nA): The ambient light signal.
3.3.5.2 Sensor Readings
Emission (Current): The sensor filament emits electrons to excite the valence
electrons of the measured material. Emission current is a measure of the electron
current emitted by the filament.
CAUTION
Refer to the label attached to your sensor or emitter
assembly package for correct emission current settings.
Do not operate 016-xxx series sensors with Yttria
filaments at Emission current greater than 2 mA. Instant
filament failure may occur! 016-xxx series sensors with
Thoria filaments may be operated at 4 mA emission.
Leakage (Current): As a sensor is used, material deposited on the sensor can
create leakage paths for the emission current. Leakage current is measured when
the bias on the filament is at +180 V, and no emission occurs. Values above 50%
of the Emission current indicate the sensor may need to be cleaned or replaced.
(Filament) Power: The power, in watts, supplied to the sensor filament. Seven
watts or less is normal. As the chamber pressure rises or the filament wears,
filament power and light intensity created by the filament will increase.
Fil(ament) Cur(rent): The current flowing through the filament. Around two to
three amps is normal.
Bias V(oltage): The voltage used to accelerate the emitted electrons. The factory
setting is 180 V.
Status: Fail indicates an open filament.
3.3.5.3 QCM Readings
The QCM grid is shown only when an SQM-242 or Q-pod QCM is installed.
Rate: The deposition rate (in Å/s) measured by each QCM sensor.