INFICON Guardian EIES Controller - Manual (Page 121)

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Guardian Co-Deposition Controller Operating Manual
5.3.2 EIES Filament or Emitter Assembly Replacement
NOTE: The emitter assembly 016-201-Gx (G1=Thoria, G2=Yttria) itself is not
considered a repairable item.
While average filament and emitter life is approximately 1000 hours at 2 mA for
Yttria filaments and 4 mA for Thoria filaments, process parameters can affect this
figure. Refer to the label attached to your emitter packaging for correct emission
current setting. Operating at lower filament currents extends filament life.
Therefore, a routine service schedule should be established for each installation.
Before you replace the filament or emitter assembly, please read the general
precautions listed below:
CAUTION
Be sure the Sensor is replaced in the exact location and
orientation as before its removal. This will minimize the
calibration error experienced on the first run after the
replacement.
CAUTION
Apply a light, fresh coating of graphite (IPN 009-175) on
all screws removed from the Sensor before replacing
them.
CAUTION
Follow standard vacuum procedures to prevent emitter
contamination by improper handling.
Follow the steps below to replace the 016-201-G1 emitter assembly: