INFICON Guardian EIES Controller - Manual (Page 141)

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Guardian Co-Deposition Controller Operating Manual
Example Response: Set Process Update Failed
@UP;<NAK>;<ERR>;??<CR>
Where:
01 Illegal Command
02 Illegal Parameter
03 Illegal Format
04 Checksum Error
05 Request Denied
06 Unknown Error
7.2.3.3 EIES ActiveX Program Command Summary
Query Process
@QP;<param1>
where <param1> is:
01 Process Name
02 Process Time (mm:ss)
03 Active Layer #
04 Layer Time (mm:ss)
05 Phase # (where phase numbers returned are)
00 Application Startup
09 ShutterDelay Phase
01 Program Initializing 10 Deposit Phase
02 Not Used 11 Layer Stopped
03 Not Used 12 Layer Starting
04 Process Stopped 13 Not Used
05 Ramp1 Phase 14 Not Used
06 Soak1 Phase 15 Not Used
07 Ramp2 Phase 16 Idle Ramp Phase
08 Soak2 Phase 17 Idle Phase
06 Phase Time (mm:ss)
07 Run #
08 All Process Names (comma delimited list)
09 Number of Process layers
1n Source Shutter Status, n=1 to 8 (0=Open, 1=Close)
2n Sensor Shutter Status , n=1 to 8 (0=Open, 1=Close)
34 DataLog Status (0=Off, 1=On)
36 DataLog FileName
37 DataLog Interval
38 DataLog Type (0=Overwrite, 1=Append, 2=Run#)
4n Power Mode Channel n (1 to 8), 1 = PID, 0= Manual Power
Update Process
@UP;<param1>;<data> where <param1> is:
NOTE: Update commands 01, 07, and 09 are only valid in Stop Mode.
01
Set Active Process (data = process name)
02 Start Process
03 Stop Process
04 Start Layer