INFICON Guardian EIES Controller - Manual (Page 143)

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Guardian Co-Deposition Controller Operating Manual
03 D Term
05 Shutter Timeout
06 Shutter Accuracy
10 Calibration Accuracy
11 Calibration Sample Time
12 Calibration Interval Time
13 Ramp 1 Power
14 Ramp 1 Time
15 Soak 1 Time
16 Ramp 2 Power
17 Ramp 2 Time
18 Soak 2 Time
19 Not Used
20 Not Used
21 Not Used
22 Idle Power
23 Idle Ramp Time
27 Slew Rate
28 QCM Density
29 QCM Tooling
30 QCM Z-Factor (Z-Ratio)
31 Input Type
32 PMT Voltage
33 Cal Gain
34 Cal Offset
35 User Units
36 User Multiplier
37 User Offset
38 Exponent
39 Integer Digits
40 Decimal Digits
41 Filter
42 QCM Cal Number