INFICON Guardian EIES Controller - Manual (Page 134)

6 - 10
IP
N 07
4-
51
7-
P1
D
Guardian Co-Deposition Controller Operating Manual
6.4.5 Gain Calibration - QCM
A Quartz Crystal Monitor (QCM) provides an accurate means of calibrating EIES
detector gain. While it can be used in the manner described above, INFICON
SQM-242 or Q-pod provides an automated approach.
Show the channel's Edit Layer dialog box, FilmCal. tab. Select the QCM input you
want to use in the Cal. QCM # drop-down. Enter the Density and ZFactor (Z-Ratio)
for the material being calibrated. If you don't know the Z-Ratio, use a new crystal
and set ZFactor = 1. Set Cal. Accuracy to 100% for now, and Cal. Interval = 0. Set
Cal. Sample to a value that will give adequate measurement time, maybe 10
seconds.
Start deposition of only the material you want to calibrate, under PID control. When
deposition reaches a stable value, click Calibrate Start. The QCM shutter will open,
then after 5 seconds the calibration sample will begin. When calibration is done,
the Cal. Gain value will be updated so that the EIES channel reading matches the
CQM reading.
The algorithm used for QCM calibration is:
1 Open the crystal shutter.
2 Wait 5 seconds for thermal stabilization.
3 Measure rate and thickness of EIES and QCM.
4 Verify that stability of rate signals are within Cal. Accuracy value.
5 Measure rate and thickness until the end of Cal. Sample time.
6 Verify that EIES and QCM thickness are >=100 Å.
7 Calculate Cal. Gain = QCM Thickness / EIES Thickness.