2 - 13
IP
N 07
4-
51
7-
P1
D
Guardian Co-Deposition Controller Operating Manual
The Film and Film Cal(ibration) tabs are for the selected film, Se. On the Film tab
set preconditioning Ramp1 Power, Ramp1 Time, and Soak1 Time as shown in
Figure 2-11
.
Figure 2-11 Film Tab Settings